LUO Wen1, HAO Zhenhua2,3, LI Shurong1, MENG Jiang1, CHEN Jie2,3, LIU Yang2,3
Abstract:
Indium tin oxide(ITO) material powder, as a key factor affecting the preparation of target, played an important role in the quality of the prepared target. In order to improve the suppression performance of nano indium oxide and tin oxide mixed powder, to improve the quality of ITO raw material powder, in this experiment, nano-indium oxide and tin oxide powder were mixed with dispersant and binder, and then ball milled, and then pressure spray granulation technology was used to prepare near spherical indium oxide tin powder. The effects of slurry viscosity, binder content, slurry solid content and inlet air temperature on the surface morphology, bulk density, tap density and particle size distribution of indium tin oxide powders were studied. The results showed that when the mass fraction of binder polyvinyl alcohol (PVA) was 1%, the solid content of indium tin oxide slurry was 50%, and the inlet air temperature of pressure spray granulator was 200 ℃, the indium tin oxide granulating powder with good performance could be obtained. Spray granulation process can effectively improve the bulk density and tap density of nano indium oxide and tin oxide mixed powder, and improve its pressing performance, which would be favorable for subsequent sintering to obtain high density ITO target.