Process Research on Spray Granulation of Mixed Indium Oxide and Tin Oxide Powder

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Process Research on Spray Granulation of Mixed Indium Oxide and Tin Oxide Powder

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[1]LUO Wen,HAO Zhenhua,LI Shurong,et al.Process Research on Spray Granulation of Mixed Indium Oxide and Tin Oxide Powder[J].Journal of Zhengzhou University (Engineering Science),2022,43(02):98-104.[doi:10.13705/j.issn.1671-6833.2022.02.011]

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Journal of Zhengzhou University (Engineering Science)[ISSN 1671-6833/CN 41-1339/T] Volume: 43卷 Number of periods: 2022 02 Page number: 98-104 Column: Public date: 2022-02-27

Title:: Process Research on Spray Granulation of Mixed Indium Oxide and Tin Oxide Powder

Author(s):: LUO Wen¹; HAO Zhenhua²; 3; LI Shurong¹; MENG Jiang¹; CHEN Jie²; 3; LIU Yang²; 3; 1.State Key Laboratory of Rare Metal Special Materials, Northwest Rare Metal Materials Research Institute, Shizuishan 753000, China;
2.Henan Province Industrial Technology Research Institute of Resources and Materials, Zhengzhou University, Zhengzhou 450001, China;
3.School of Materials Science and Engineering, Zhengzhou University, Zhengzhou 450001, China

Keywords:: indium oxide; tin oxide; spray granulation; ITO target; binder mass fraction

CLC:: TB332

DOI:: 10.13705/j.issn.1671-6833.2022.02.011

Abstract:: Indium tin oxide(ITO) material powder, as a key factor affecting the preparation of target, played an important role in the quality of the prepared target. In order to improve the suppression performance of nano indium oxide and tin oxide mixed powder, to improve the quality of ITO raw material powder, in this experiment, nano-indium oxide and tin oxide powder were mixed with dispersant and binder, and then ball milled, and then pressure spray granulation technology was used to prepare near spherical indium oxide tin powder. The effects of slurry viscosity, binder content, slurry solid content and inlet air temperature on the surface morphology, bulk density, tap density and particle size distribution of indium tin oxide powders were studied. The results showed that when the mass fraction of binder polyvinyl alcohol (PVA) was 1%, the solid content of indium tin oxide slurry was 50%, and the inlet air temperature of pressure spray granulator was 200 ℃, the indium tin oxide granulating powder with good performance could be obtained. Spray granulation process can effectively improve the bulk density and tap density of nano indium oxide and tin oxide mixed powder, and improve its pressing performance, which would be favorable for subsequent sintering to obtain high density ITO target.

References:: ［1］姜辛，孙超，洪瑞江．透明导电氧化物薄膜［M］．北京: 高等教育出版社，2008．
［2］ MEI F S，YUAN T C，LI Ｒ D，et al．Effects of element chemical states and grain orientation growth of ITO targets on photoelectric properties of the film ［J］． Ceramics international，2017，43( 17) : 14732－14741．
［3］王松，谢明，王塞北，等．高密度氧化铟锡( ITO) 靶材制备工艺的研究进展［J］．材料导报，2013，27( 增刊 1) : 207－210，220．
［4］王玥，刘家祥，刘宸．纳米级 ITO 粉体对烧结法制备靶材的影响［J］．稀有金属材料与工程，2011，40 ( 12) : 2179－2183．
［5］刘志宏，谌伟，李玉虎，等．成型压力对冷等静压-烧结法制备 ITO 靶材中孔隙缺陷的影响［J］．中国有色金属学报，2015，25( 9) : 2435－2444．
［6］杨扬，傅清波，谢梦．纳米 ITO 粉体的团聚与分散分析［J］．新材料产业，2019( 8) : 54－57．
［7］杨小林，扈百直，刘秉宁，等．影响大尺寸 ITO 靶材冷压质量的因素［J］．云南冶金，2019，48 ( 1) : 61－65．
［8］李晶，赵晓东，李芝华，等．喷雾干燥-冷等静压-烧结法制备 ITO 靶材的工艺研究［J］．稀有金属与硬质合金，2011，39( 2) : 38－41，46．
［9］ MEI F S，YUAN T C，LI Ｒ D，et al．Effect of heat treatment on the dispersion and sintering behaviour of tin doped indium oxide powders ［ J ］． Ceramics international，2018，44( 7) : 7491－7499．
［10］ MA X B，ZHANG W J，WANG D X，et al．Comparing microstructures of ITO sputtering targets prepared by tin doped indium oxide powders and In2O3-SnO2 mixed powders［J］．Ｒare metal materials and engineering， 2015，44( 12) : 2937－2942．
［11］ QIN K，MEI F S，YUAN T C，et al．Effects of sintering processes on the element chemical states of In，Sn and O in ITO targets［J］．Journal of materials science: materials in electronics，2018，29( 10) : 7931－7940．
［12］ MEI F S，YUAN T C，LI Ｒ D，et al．Effects of particle size and dispersion methods of In2O3-SnO2 mixed powders on the sintering properties of indium tin oxide ceramics［J］． International journal of applied ceramic technology，2018，15( 1) : 89－100．
［13］ MEI F S，QIN K，YUAN T C，et al． Effects of oxygen flow velocity on the sintering properties of ITO targets ［J］．Journal of materials science: materials in electronics，2017，28( 19) : 14711－14719．
［14］ WEGENEＲ M，KATO M，KAKIMOTO K I，et al．PVP a binder for the manufacture of ultrathin ITO/polymer nanocomposite films with improved electrical conductivity［J］．Journal of materials science，2015，50 ( 18) : 6124－6133．
［15］傅宪辉，沈志刚．喷雾造粒中形成的各种颗粒形貌和结构［J］．中国粉体技术，2005，11( 2) : 44－49．

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Last Update: 2022-02-25