Study on Sensitive Structure of Graphene Resonant Pressure Sensor
[1]Fan Shangchun,Zhang Jin,Zhu Liming.Study on Sensitive Structure of Graphene Resonant Pressure Sensor[J].Journal of Zhengzhou University (Engineering Science),2019,40(06):47-52.[doi:10.13705/j.issn.1671-6833.2019.06.011]
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Journal of Zhengzhou University (Engineering Science)[ISSN
1671-6833/CN
41-1339/T] Volume:
40卷
Number of periods:
2019 06
Page number:
47-52
Column:
Public date:
2019-11-16
- Title:
- Study on Sensitive Structure of Graphene Resonant Pressure Sensor
- CLC:
- TN629.1
- DOI:
- 10.13705/j.issn.1671-6833.2019.06.011
- Abstract:
- The excellent mechanical and electrical properties of graphene make it an ideal material for nanoelectromechanical systems. As a resonator, graphene is expected to enable resonant pressure sensors to achieve higher measurement sensitivity in the low voltage range. In this paper, a resonator with graphene material as beam is designed with reference to a silicon resonant pressure sensor. The theoretical analysis and finite element simulation of the resonator are performed. The working mechanism is revealed, and the influence of the structural parameters of the resonator on the sensitivity is explored. The simulation results show that the sensitivity decreases with the thickness of the silicon film and the length of the beam, and increases with the length and depth of the groove side. The paper also proposes a preliminary processing scheme for harmonic oscillators.
- References:
-
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Last Update:
2019-11-25