Study on Sensitive Structure of Graphene Resonant Pressure Sensor
[1]Fan Shangchun,Zhang Jin,Zhu Liming.Study on Sensitive Structure of Graphene Resonant Pressure Sensor[J].Journal of Zhengzhou University (Engineering Science),2019,40(06):47-52.[doi:10.13705/j.issn.1671-6833.2019.06.011]
Copy
Journal of Zhengzhou University (Engineering Science)[ISSN
1671-6833/CN
41-1339/T] Volume:
40
Number of periods:
2019 06
Page number:
47-52
Column:
Public date:
2019-11-16
- Title:
- Study on Sensitive Structure of Graphene Resonant Pressure Sensor
- CLC:
- TN629.1
- DOI:
- 10.13705/j.issn.1671-6833.2019.06.011
- Abstract:
- The excellent mechanical and electrical properties of graphene make it an ideal material for nanoelectromechanical systems. As a resonator, graphene is expected to enable resonant pressure sensors to achieve higher measurement sensitivity in the low voltage range. In this paper, a resonator with graphene material as beam is designed with reference to a silicon resonant pressure sensor. The theoretical analysis and finite element simulation of the resonator are performed. The working mechanism is revealed, and the influence of the structural parameters of the resonator on the sensitivity is explored. The simulation results show that the sensitivity decreases with the thickness of the silicon film and the length of the beam, and increases with the length and depth of the groove side. The paper also proposes a preliminary processing scheme for harmonic oscillators.
- References:
-
[1] NOVOSELOV K S, GEIM A K, MOROZOV S V, et al.Electric field effect in atomically thin carbon films[J].Science, 2004, 306(5696): 666-669.[2] NI Z H, WANG H M, KASIM J, et al.Graphene thic-kness determination using reflection and contrast spectroscopy[J].Nano letters, 2007, 7(9): 2758-2763.[3] LEE C, WEI X, KYSAR J W, et al.Measurement of the elastic properties and intrinsic strength of monolayer graphene[J].Science, 2008, 321(5887): 385-388.[4] BALANDIN A A, GHOSH S, BAO W, et al.Superior thermal conductivity of single-layer graphene[J].Nano letters, 2008, 8(3): 902-907.[5] CHEN J, JANG C, XIAO S, et al.Intrinsic and Extrinsic performance limits of graphene device on SiO2[J].Nature nanotechnology, 2008, 3(4):206-209.[6] BUNCH J S, ZANDE A M, VERBRIGE S S, et al.Electromechanical resonators from graphene sheets[J].Science, 2007, 315(5811): 490-493.[7] ZANDE A V D, BARTON R A, ALDEN J S, et al.Large-scale arrays of single-layer graphene resonators[J].Nano letters, 2010, 10(12):4869-4873.[8] HABIBI M, DARBARI S, RAJABALI S, et al.Fabrication of a graphene-based pressure sensor by utilising field emission behavior of carbon nanotubes[J].Carbon,2016,96:259-267.[9] 樊尚春.传感器技术及应用[M].第3版.北京:北航航空航天大学出版社,2016:337-338.[10] 苑伟政, 任森, 邓进军,等.硅微机械谐振压力传感器技术发展[J].机械工程学报, 2013, 49(20): 2-9.[11] SHIVARAMAN S, BARTON R A, YU X, et al.Free-standing epitaxial graphene[J].Nano letters,2009,9(9):3100-3105.[12] LUO D, ZHANG G, LIU J, et al.Evaluation criteria for reduced graphene oxide[J].Journal of physical chemistry C,2011,115(23):11327-11335.[13] KIM K S, ZHAO Y, JANG H, et al.Large-scale pattern growth of graphene films for stretchable transparent electrodes[J].Nature,2009,457:706-710.
- Similar References:
Memo
-
Last Update:
2019-11-25