High Performance Methane Gas Sensor Based on Micro-hotplatform
[1]GUO Lianfeng,XU Zongke,DUAN Guotao,et al.High Performance Methane Gas Sensor Based on Micro-hotplatform[J].Journal of Zhengzhou University (Engineering Science),2016,37(03):40-.[doi:10.13705/j.issn.1671-6833.2016.03.009]
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Journal of Zhengzhou University (Engineering Science)[ISSN
1671-6833/CN
41-1339/T] Volume:
37
Number of periods:
2016 03
Page number:
40-
Column:
Public date:
2016-05-10
- Title:
- High Performance Methane Gas Sensor Based on Micro-hotplatform
- Keywords:
- methane gas sensor; micro-hotplatform; tin dioxide in-situ fabrication; template method; micro/nano fusion
- CLC:
- TP212.2
- Abstract:
- Abstract:High performance methane gas sensor based on micro-hotplatform ( MHP) was designed and fabri-cated. MHP is widely used in semiconductor gas sensor because of its low power consumption,small volumecharacteristics.The MHP is fabricated based on lC compatible MEMS technology. Micro-nano gas senor wasprepared through in-situ fabrication of tin dioxide using template method. The power consumption of the sensoris only 39 mW , and the response time is 2 s,and the sensitivity to 714 mg/m’methane is as high as 1.19.Because of high signal noise ratio,the detection limit is estimated to be 18 mg/m’through liner fit.The highperformance and low cost sensor is expected to be widely used in industry and safety monitoring.
- References:
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