[1]GUO Qiang,Li Zhenguo.Processing and flow measurement of rectangular micron flow channel [J].Journal of Zhengzhou University (Engineering Science),2006,27(04):116-120.[doi:10.3969/j.issn.1671-6833.2006.04.028]
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Journal of Zhengzhou University (Engineering Science)[ISSN
1671-6833/CN
41-1339/T] Volume:
27卷
Number of periods:
2006年04期
Page number:
116-120
Column:
Public date:
1900-01-01
- Title:
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Processing and flow measurement of rectangular micron flow channel
- Author(s):
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GUO Qiang; Li Zhenguo
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- Keywords:
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- CLC:
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- DOI:
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10.3969/j.issn.1671-6833.2006.04.028
- Abstract:
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A relatively mature rectangular micron flow channel (micro-channel) processing technology was introduced, and the rubber template was prepared on the silicon wafer by thick glue lithography process, and then the micron-level microchannel (height and width range 20~100μm) was made with polymer PDMS (polydimethylsiloxane, polydimethylsiloxane) on the template, and the geometric accuracy of the prepared microchannel was magnified by 20×100 times, and the flow characteristics were experimentally determined. Compared with the Poisu leaf theory formula (the pipe flow expression of the NS equation), it can be seen that the Poisu leaf formula is still applicable in rectangular microfluidic channels with the order of microns.