SPEB analysis of ZrO2 films
[1]Lou Yanliang,Xiao Wenkai.SPEB analysis of ZrO2 films[J].Journal of Zhengzhou University (Engineering Science),2001,22(02):28-29.[doi:10.3969/j.issn.1671-6833.2001.02.009]
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Journal of Zhengzhou University (Engineering Science)[ISSN
1671-6833/CN
41-1339/T] Volume:
22
Number of periods:
2001年02期
Page number:
28-29
Column:
Public date:
1900-01-01
- Title:
- SPEB analysis of ZrO2 films
- CLC:
- -
- Abstract:
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Compositional analysis of homemade ZrO2 films was performed by slow positron beam (SPEB). The results show that there is a high positron absorbing layer about 2 nm thick on the surface layer of ZrO20 film, and the special structure of the surface layer is related to the partial polymerization of Y on the surface layer. Annealing treatment above 500 °C can greatly reduce the thickness of this layer.
- References:
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- Similar References:
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Last Update:
1900-01-01
