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High Performance Methane Gas Sensor Based on Micro-hotplatform
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[1]GUO Lianfeng,XU Zongke,DUAN Guotao,et al.High Performance Methane Gas Sensor Based on Micro-hotplatform[J].Journal of Zhengzhou University (Engineering Science),2016,37(03):40-.[doi:10.13705/j.issn.1671-6833.2016.03.009]
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Journal of Zhengzhou University (Engineering Science)[ISSN 1671-6833/CN 41-1339/T] Volume: 37 Number of periods: 2016 03 Page number: 40- Column: Public date: 2016-05-10
Title:
High Performance Methane Gas Sensor Based on Micro-hotplatform
Author(s):
GUO Lianfeng1; 2; XU Zongke2; DUAN Guotao3; Ll Tiel 2
1. Shanghai Ilnstitute of Microsystem and lnformation Technology,Chinese Academy of Sciences,Shanghai 200050,China;2.Science and’Technology on Microsystem Laboratory,Shanghai 200050,China; 3.Institute of Solid State Physics,Chinese A-cademy of Sciences,Hefei 230031,China.
Keywords:
methane gas sensor; micro-hotplatform;  tin dioxide in-situ fabrication;  template method;  micro/nano fusion
CLC:
TP212.2
DOI:
10.13705/j.issn.1671-6833.2016.03.009
Abstract:
Abstract:High performance methane gas sensor based on micro-hotplatform ( MHP) was designed and fabri-cated. MHP is widely used in semiconductor gas sensor because of its low power consumption,small volumecharacteristics.The MHP is fabricated based on lC compatible MEMS technology. Micro-nano gas senor wasprepared through in-situ fabrication of tin dioxide using template method. The power consumption of the sensoris only 39 mW , and the response time is 2 s,and the sensitivity to 714 mg/m’methane is as high as 1.19.Because of high signal noise ratio,the detection limit is estimated to be 18 mg/m’through liner fit.The highperformance and low cost sensor is expected to be widely used in industry and safety monitoring.
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