Study on The Preparation Process of MoS2/Zr Composite Film
[1]SONG Wenlong,DENG Jianxin,ZHANG Hui.Study on The Preparation Process of MoS2/Zr Composite Film[J].Journal of Zhengzhou University (Engineering Science),2009,30(01):124-128.
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Journal of Zhengzhou University (Engineering Science)[ISSN
1671-6833/CN
41-1339/T] Volume:
30卷
Number of periods:
2009 01
Page number:
124-128
Column:
Public date:
1900-01-01
- Title:
- Study on The Preparation Process of MoS2/Zr Composite Film
- Keywords:
- MoS2 soft coating; Medium frequency magnetron sputtering; Multi-arc ion plating; MoS2/Zr composite film; Performance
- CLC:
- -
- DOI:
- -
- Abstract:
- MoS14/Zr composite films were prepared on cemented carbide YT2 matrix by composite coating process combining medium frequency magnetron sputtering and multi-arc ion plating. The surface and cross-sectional morphology of the composite film were investigated by scanning electron microscopy (SEM), and the composition of the film was analyzed by energy spectroscopy (EDX). The effects of deposition process parameters such as deposition temperature, negative bias of matrix and Zr current on the adhesion, microhardness and thickness of composite films were studied. The results show that the deposition process parameters have a great influence on the performance of MoS2/Zr composite films, and reasonable selection of deposition process parameters can significantly improve and improve the performance of the composite films, and the influence mechanism of deposition parameters on the properties is analyzed. Under the experimental conditions, the optimal deposition process parameters are: deposition temperature 200 °C, matrix bias 180 V, Zr current 30 A, the structure of the prepared MoS2/Zr composite film is dense, the adhesion is about 60 N, the thickness is about 2.4 μm, and the microhardness is about HV900.
- References:
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Last Update:
1900-01-01