Virtual simulation of PECVD working process based on engine mechanism
[1]WANG Dong,MA Xiaofeng,LI Dalei,et al.Virtual simulation of PECVD working process based on engine mechanism[J].Journal of Zhengzhou University (Engineering Science),2008,29(03):54-58.[doi:10.3969/j.issn.1671-6833.2008.03.014]
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Journal of Zhengzhou University (Engineering Science)[ISSN
1671-6833/CN
41-1339/T] Volume:
29
Number of periods:
2008年03期
Page number:
54-58
Column:
Public date:
1900-01-01
- Title:
- Virtual simulation of PECVD working process based on engine mechanism
- CLC:
- -
- Abstract:
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The working principle of horizontal PECVD was discussed, and the key technologies of simulation in the virtual machining process were studied. Based on the powerful engine mechanism of the Open Inventor development platform, the simulation of the virtual processing process of the continuous plasma-enhanced chemical vapor deposition (PECVD) system (In-line PECVD) system is realized by the program, so as to ensure the design success rate of the physical prototype and reduce the design and trial production time of the physical prototype.
- References:
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- Similar References:
Memo
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Last Update:
1900-01-01
