[1]张先乐,刘自豪,黄 浩,等.In2 O3 / TiO2 室温氢气传感器及其优异的氢敏性能[J].郑州大学学报(工学版),2022,43(04):104-110.
 Research of In2 O3 / TiO2 Room Temperature Hydrogen Sensors and Its Excellent Hydrogen Sensitivity[J].Journal of Zhengzhou University (Engineering Science),2022,43(04):104-110.
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In2 O3 / TiO2 室温氢气传感器及其优异的氢敏性能()
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《郑州大学学报(工学版)》[ISSN:1671-6833/CN:41-1339/T]

卷:
43
期数:
2022年04期
页码:
104-110
栏目:
出版日期:
2022-07-03

文章信息/Info

Title:
Research of In2 O3 / TiO2 Room Temperature Hydrogen Sensors and Its Excellent Hydrogen Sensitivity
作者:
张先乐 刘自豪 黄 浩 范佳杰
文献标志码:
A
摘要:
为改善纳米 TiO2 传感器在室温下对 H2 虽有快速响应但恢复过慢的问题,引入商业纳米 In2 O3 对其进行改性。 分别采用压片法和阳极氧化-沉积法制备了 In2 O3 / TiO2 纳米复合压片薄膜和 In2 O3 / TiO2 纳米管阵列,并将其应用于氢气传感器,研究了其室温氢敏性能。 采用扫描电镜、X 射线衍射、比表面积测试等方法对样品进行了表征,并研究了不同电极( Ag、Pt、Pd) 、不同热处理温度及不同质量分数的 In2 O3 对复合传感器室温氢敏性能的影响。 结果表明,与纯 TiO2 传感器相比,复合传感器扩大了氢气的检测范围,室温下可检测到体积分数 1× 10 - 6 ~ 1× 10 - 3 的氢气,且恢复时间大大缩短。 其中,以 Pt 为电极,经 600 ℃ 退火的质量分数为 20% 的 In2 O3 / TiO2 复合传感器表现出最优的氢敏性能,在室温下对体积分数 1× 10 - 6 H2 的响应时间为 7 s,恢复时间为 32 s。
Abstract:
In order to solve the problem that the nano-TiO2 sensor had a fast response to H2 , but the recovery was too slow at room temperature, commercial nano-In2 O3 was introduced to modify it. In2 O3 / TiO2 nanocom- posite pressed films and In2 O3 / TiO2 nanotube arrays were prepared by pressing method and anodic oxidation- deposition method, respectively. They were applied to hydrogen sensors, and their hydrogen sensitivity were studied at room temperature. The samples were characterized by scanning electron microscopy, X-ray diffrac- tion and specific surface area measurement. And the effects of different electrodes ( Ag, Pt, Pd), different heat treatment temperatures and different In2 O3 / TiO2 mass fractions on the hydrogen sensitivity of the sensors at room temperature were studied. It was found that compared with the pure TiO2 sensor, the composite sensor expanded the detection range of hydrogen, and could detect 1 × 10 - 6 - 1 × 10 - 3 hydrogen at room temperature, and the recovery time was greatly shortened. Among them, the In2 O3 / TiO2 composite sensor with a mass frac- tion of 20% and annealed at 600 ℃ with Pt as the electrode exhibited the best hydrogen sensitivity. At room temperature, the response time to 1 × 10 - 6 H2 was 7 s, and the recovery time is 32 s.
更新日期/Last Update: 2022-07-03