[1]孙佳庆,李红涛,郭春文,等.沉积条件对CVD-SiC涂层组织形貌和抗氧化性能的影响[J].郑州大学学报(工学版),2021,42(06):75-80.
点击复制

沉积条件对CVD-SiC涂层组织形貌和抗氧化性能的影响()
分享到:

《郑州大学学报(工学版)》[ISSN:1671-6833/CN:41-1339/T]

卷:
42
期数:
2021年06期
页码:
75-80
栏目:
出版日期:
2021-11-10

文章信息/Info

Title:
Effects of deposition pressure and substrate position on morphology and oxidation resistance of CVD- SiC coating s
作者:
孙佳庆李红涛郭春文范宇恒张东生赵红亮
文献标志码:
A
摘要:
采用化学气相沉积法在高纯石墨基体表面制备了碳化硅(SiC)涂层,研究了基体位置和沉积压力对涂层组织形貌和抗氧化性能的影响。在基体位置的影响方面,随着基体与布气盘的距离增大,晶粒<111>生长方向的择优性先增强而后减弱,其晶粒的砂砾状生长特征也呈现先增强后减弱的变化规律;当基体与布气盘的距离较小时涂层易出现气孔,随着距离增大气孔逐渐消失,涂层抗氧化性能升高,而随着距离的进一步增大开始出现分界现象,造成涂层抗氧化性能再次下降。在沉积压力的影响方面,随着沉积压力增大,晶粒<111>生长方向的择优性被弱化,晶粒的砂砾状特征也随之减弱;沉积压力为2 kPa时,涂层无明显缺陷,涂层抗氧化性能较为优异,而当沉积压力增大到5 kPa和20 kPa时,涂层分别出现了分界和分层缺陷,导致涂层抗氧化性能下降。
Abstract:
Silicon carbide (SiC) coatings were prepared on the surface of a high-purity graphite substrate by chemical vapor deposition, and the effects of deposition pressure and substrate position on the morphologies and oxidation resistance of the coatings were studied. In terms of the effect of the substrate position, with the increase of the distances between the substrate s and the air distribution plate, the preference of the <111> growth direction of the grains first strengthened and then weakened, and the gravel-like growth characteristics of the grains also showed a law of change of first strengthening and then weakening . When the distances between the substrate s and the air distribution plate were relatively close, the coating s were prone to pores. As the distance s increase d, the pores gradually disappeared, and the oxidation resistance of the coatings increase d. With the further increase of the distances, the phenomenon of d emarcation beg an to appear, causing the oxidation resistance of the coating to decrease again. In terms of the influence of deposition pressure, due to the preference of the <111> growth direction of the grains was weakened with the increase of deposition pressure, the gravel-like growth characteristics of the grains were also weakened . When the deposition pressure was 2 kPa, the coating had no obvious defects, the coating had excellent oxidation resistance, and when the deposition pressure increased to 5 kPa and 20 kPa, the coatings had defects of demarcation and delamination, respectively, resulting in a decrease in the oxidation resistance of the coatings
更新日期/Last Update: 2021-12-17