氧化铟和氧化锡混合粉体喷雾造粒工艺研究-《郑州大学学报(工学版)》

文章信息/Info

Title:: Process Research on Spray Granulation of Mixed Indium Oxide and Tin Oxide Powder

作者:: 罗文; 郝振华; 李树荣; 孟将; 陈杰; 刘洋; 西北稀有金属材料研究院稀有金属特种材料国家重点实验室;郑州大学河南省资源与材料工业技术研究院;郑州大学材料科学与工程学院;

Author(s):: LUO Wen¹; HAO Zhenhua²; 3; LI Shurong¹; MENG Jiang¹; CHEN Jie²; 3; LIU Yang²; 3; 1.State Key Laboratory of Rare Metal Special Materials, Northwest Rare Metal Materials Research Institute, Shizuishan 753000, China;
2.Henan Province Industrial Technology Research Institute of Resources and Materials, Zhengzhou University, Zhengzhou 450001, China;
3.School of Materials Science and Engineering, Zhengzhou University, Zhengzhou 450001, China

Keywords:: indium oxide; tin oxide; spray granulation; ITO target; binder mass fraction

摘要:: 为了改善纳米氧化铟和氧化锡混合粉体的压制性能，本实验采用压力喷雾造粒技术制备近球形造粒氧化铟锡粉。采用SEM、斯科特流量计、振实密度仪和激光粒度仪分别研究粘结剂含量、浆料固含量和进风温度对造粒氧化铟锡粉体微观形貌、松装密度、振实密度以及粒度分布的影响。结果表明：当粘结剂含量为1%，浆料固含量为50%以及进风温度为200℃时可以得到球形度高、球化率高、粒径分布窄、松装密度和振实密度高的氧化铟锡造粒粉。

Abstract:: Indium tin oxide(ITO) material powder, as a key factor affecting the preparation of target, played an important role in the quality of the prepared target. In order to improve the suppression performance of nano indium oxide and tin oxide mixed powder, to improve the quality of ITO raw material powder, in this experiment, nano-indium oxide and tin oxide powder were mixed with dispersant and binder, and then ball milled, and then pressure spray granulation technology was used to prepare near spherical indium oxide tin powder. The effects of slurry viscosity, binder content, slurry solid content and inlet air temperature on the surface morphology, bulk density, tap density and particle size distribution of indium tin oxide powders were studied. The results showed that when the mass fraction of binder polyvinyl alcohol (PVA) was 1%, the solid content of indium tin oxide slurry was 50%, and the inlet air temperature of pressure spray granulator was 200 ℃, the indium tin oxide granulating powder with good performance could be obtained. Spray granulation process can effectively improve the bulk density and tap density of nano indium oxide and tin oxide mixed powder, and improve its pressing performance, which would be favorable for subsequent sintering to obtain high density ITO target.