In the preparation of CdTe solar cells, the contact characteristics of CdTe solar cells are improved by using Te/Cu/Ni structures with simple processes as contacts. Different temperature combinations were used to annealed CdTe solar cells of this structure. The influence of Te/Cu/Ni contact on device performance was analyzed by changing the performance parameters of the battery before and after heat treatment and the dark I~V and C~V curves. Through the analysis, it can be concluded that the heat treatment of Te/Cu/Ni contact has an important influence on the performance of CdTe solar cells. When the cur annealing temperature is low (130 °C, 160 °C), the reprocessing of Te/Cu/Ni can significantly improve the cell efficiency, so that the final efficiency of the cell is higher than that of the Cu high-temperature annealed battery. However, when the Cu annealing temperature is high (190 °C), the reprocessing of Te/Cu/Ni makes the device performance worse, and the higher the heat treatment temperature of Te/Cu/Ni, the more severe the degradation of battery performance. Experiments show that the Te/Cu/Ni structure as the back contact of CdTe solar cells may improve the performance of the battery after appropriate heat treatment, and the process is relatively simple.