[1]徐林华,李相银,袁俊..Fe掺杂对ZnO薄膜的微结构与光学性质的影响[J].郑州大学学报(工学版),2008,29(04):33-37.[doi:10.3969/j.issn.1671-6833.2008.04.008]
　XU Linhua,Lee Sang-eun,Yuan Jun.Effect of Fe doping on microstructure and optical properties of ZnO films[J].Journal of Zhengzhou University (Engineering Science),2008,29(04):33-37.[doi:10.3969/j.issn.1671-6833.2008.04.008]

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Fe掺杂对ZnO薄膜的微结构与光学性质的影响()

分享到：

《郑州大学学报(工学版)》[ISSN:1671-6833/CN:41-1339/T]

卷:

29卷

期数:

2008年04期

页码:

33-37

栏目:

出版日期:

1900-01-01

文章信息/Info

Title:

Effect of Fe doping on microstructure and optical properties of ZnO films

作者:

徐林华; 李相银; 袁俊.

南京理工大学应用物理系,江苏,南京,210094, 南京理工大学应用物理系,江苏,南京,210094, 南京理工大学应用物理系,江苏,南京,210094

Author(s):

XU Linhua; Lee Sang-eun; Yuan Jun

关键词:

ZnO薄膜;  溶胶-凝胶法;  微结构;  光学性质

Keywords:

ZnO film;  Sol-gel method;  microstructure;  Optical properties

DOI:

10.3969/j.issn.1671-6833.2008.04.008

文献标志码:

A

摘要:

采用溶胶一凝胶法在石英玻璃衬底上制备了Fe掺杂的ZnO薄膜,研究了不同的Fe掺杂浓度对ZnO薄膜的微结构与光学性质的影响.利用x射线衍射分析了薄膜样品的晶向和晶相.利用原子力显微镜观测了薄膜样品的表面形貌,利用双光束紫外-可见分光光度计分析了znO薄膜样品的光学性质.实验结果表明:所有ZnO薄膜样品都是六角纤锌矿结构,ZnO晶粒沿c轴择优生长.质量分数为1%fe掺入之后,ZnO薄膜的C轴择优取向进一步增强,薄膜的晶化质量也得到进一步提高.当Fe的掺杂浓度高于1%时,ZnO薄膜(002)衍射峰的强度又降低了,这可能是由于Fe2+(x=2或3)和zn2+具有不同的离子半径,大量的Fe2+进入晶格取代Zn2+导致晶格严重畸变,从而影响了znO晶粒的正常生长.所制备的ZnO薄膜在可见光区都具有高的透射丰,由吸收边估算出来的ZnO薄膜的光学带隙表明:随着Fe的掺杂浓度的提高,光学带隙逐渐展宽.

Abstract:

Fe-doped ZnO films were prepared on quartz glass substrates by sol-gel method, and the effects of different Fe-doped concentrations on the microstructure and optical properties of ZnO films were studied. X-ray diffraction was used to analyze the crystal orientation and crystal phase of thin film samples. The surface morphology of thin film samples was observed by atomic force microscopy, and the optical properties of znO thin film samples were analyzed by dual-beam UV-Vis spectrophotometer. The experimental results show that all ZnO film samples have hexagonal zinc structure, and ZnO grains grow optimally along the c-axis. After the incorporation of 1% fe with a mass fraction, the C-axis preference orientation of ZnO films was further enhanced, and the crystallization quality of the films was further improved. When the doping concentration of Fe is higher than 1%, the intensity of the diffraction peak of ZnO film (002) decreases, which may be due to Fe2+ (x=2 or 3) and zn2+ having different ion radii, and a large amount of Fe2+ enters the lattice to replace Zn2+, resulting in severe distortion of the lattice, thus affecting the normal growth of znO grains. The prepared ZnO films have high transmission abundance in the visible region, and the optical band gap of ZnO films estimated by the absorption edge shows that the optical band gap gradually widens with the increase of Fe doping concentration.

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