[1]李海涛,耿瑞霖,王雅雯,等.直线导轨平行度误差对工作台运动误差的影响规律[J].郑州大学学报(工学版),2025,46(03):118-127.[doi:10.13705/j.issn.1671-6833.2025.03.022]
　LI Haitao,GENG Ruilin,WANG Yawen,et al.Influence Law of Parallelism Error in Linear Guide Rail on Motion Error of Worktable[J].Journal of Zhengzhou University (Engineering Science),2025,46(03):118-127.[doi:10.13705/j.issn.1671-6833.2025.03.022]
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直线导轨平行度误差对工作台运动误差的影响规律()
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《郑州大学学报(工学版)》[ISSN:1671-6833/CN:41-1339/T]

卷:
46
期数:
2025年03期
页码:
118-127
栏目:
出版日期:
2025-05-13

文章信息/Info

Title:
Influence Law of Parallelism Error in Linear Guide Rail on Motion Error of Worktable
文章编号:
1671-6833(2025)03-0118-10
作者:
李海涛;  耿瑞霖;  王雅雯;  陈敬林
陕西科技大学 机电工程学院,陕西 西安 710021
Author(s):
LI Haitao;  GENG Ruilin;  WANG Yawen;  CHEN Jinglin
College of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi’an 710021, China
关键词:
线性工作台;  平行度误差;  误差耦合;  映射模型;  运动误差
Keywords:
linear worktable;  parallelism error;  error coupling;  mapping model;  motion error
分类号:
TG156
DOI:
10.13705/j.issn.1671-6833.2025.03.022
文献标志码:
A
摘要:
现有研究多以线性工作台整体为研究对象,只能获得不同误差对一维线性工作台的局部影响规律,无法完全揭示不同类型误差之间的耦合机制,以及对工作台整体运动误差的影响规律。针对这一不足,以双导轨四滑块线性工作台为研究对象,通过动结合面刚度等效,求解滑块约束刚度矩阵,进而联合滑块在导轨和工作台双重约束下工作台协调变形以后的位姿状态,建立了一维线性工作台的误差耦合模型。基于误差耦合模型,通过齐次变换将多项平行度误差映射到滑块初始误差上,最终建立导轨安装平行度误差到工作台运动误差的映射模型。基于映射模型,模拟分析了平行度误差对工作台运动误差的影响规律,并通过有限元模拟及实验验证了结果的一致性。实验结果表明:平行度误差映射模型与有限元模型之间的最大误差不超过9.8%,不同类型平行度误差对线性工作台影响程度差异较大,通过降低偏摆和俯仰平行度误差,可以大幅度降低工作台整体误差。所提方法为线性工作台误差补偿和精度设计提供了理论支撑。
Abstract:
Most of the existing studies took the entire linear worktable as the research target, and merely obtained the local influence laws of different errors on the one-dimensional linear worktable and failed to fully disclosed the coupling mechanisms among different types of errors as well as the influence laws on the overall motion error of the worktable. In response to this deficiency, in this study, the linear worktable with double guide rails and four sliders was taken as the research target. By means of the equivalent stiffness of the dynamic interface, the constraint stiffness matrix of the sliders was solved. Then, combined with the position and posture state of the worktable after the coordinated deformation of the sliders with the double constraints of the guide rails and the worktable, the error coupling model of the one-dimensional linear worktable was established. Based on the error coupling model, multiple parallelism errors were mapped onto the initial errors of the sliders through homogeneous transformation, and ultimately, the mapping model from the parallelism error of guide rail installation to the motion error of the worktable was established. Based on the mapping model, the influence laws of parallelism errors on the motion error of the worktable were simulated and analyzed, and the consistency of the results was verified through finite element simulation and experiments. The maximum error between the parallelism error mapping model and the finite element model did not exceed 9.8%.This study indicated that different types of parallelism errors had significantly different degrees of influence on the linear worktable. By reducing the parallelism errors of yaw and pitch, the overall error of the worktable could be greatly reduced. The proposed method provided a powerful theoretical support for the error compensation and precision design of linear worktables.

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更新日期/Last Update: 2025-05-22