[1]樊尚春,张津,朱黎明.石墨烯谐振式压力传感器敏感结构研究[J].郑州大学学报(工学版),2019,40(06):47-52.[doi:10.13705/j.issn.1671-6833.2019.06.011]
　Fan Shangchun,Zhang Jin,Zhu Liming.Study on Sensitive Structure of Graphene Resonant Pressure Sensor[J].Journal of Zhengzhou University (Engineering Science),2019,40(06):47-52.[doi:10.13705/j.issn.1671-6833.2019.06.011]
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石墨烯谐振式压力传感器敏感结构研究()
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《郑州大学学报(工学版)》[ISSN:1671-6833/CN:41-1339/T]

卷:
40
期数:
2019年06期
页码:
47-52
栏目:
出版日期:
2019-11-16

文章信息/Info

Title:
Study on Sensitive Structure of Graphene Resonant Pressure Sensor
作者:
樊尚春；张津；朱黎明
北京航空航天大学仪器科学与光电工程学院
Author(s):
Fan Shangchun; Zhang Jin; Zhu Liming
School of Instrument Science and Optoelectronic Engineering, Beihang University
关键词:
石墨烯; 谐振器; 敏感结构; 加工工艺; 有限元法
Keywords:
Graphene; resonator; Sensitive structures; processing technology; finite element method
分类号:
TN629.1
DOI:
10.13705/j.issn.1671-6833.2019.06.011
文献标志码:
A
摘要:
石墨烯优异的机械性能与电学性能，使其成为纳机电系统理想的应用材料，石墨烯作为谐振子有望使得谐振式压力传感器在低压范围内实现更高灵敏度的测量.本文参考硅谐振式压力传感器设计了一种以石墨烯材料为梁的谐振子，对谐振子进行了理论分析及有限元仿真，揭示了其工作机理，探究了谐振子的结构参数对于灵敏度的影响规律.仿真结果显示灵敏度随着硅膜厚度、梁的长度增加而下降，随凹槽边长、深度的增加而提高，为设计高性能石墨烯谐振式压力传感器提供理论依据.进一步本文提出了谐振子的初步加工方案
Abstract:
The excellent mechanical and electrical properties of graphene make it an ideal material for nanoelectromechanical systems. As a resonator, graphene is expected to enable resonant pressure sensors to achieve higher measurement sensitivity in the low voltage range. In this paper, a resonator with graphene material as beam is designed with reference to a silicon resonant pressure sensor. The theoretical analysis and finite element simulation of the resonator are performed. The working mechanism is revealed, and the influence of the structural parameters of the resonator on the sensitivity is explored. The simulation results show that the sensitivity decreases with the thickness of the silicon film and the length of the beam, and increases with the length and depth of the groove side. The paper also proposes a preliminary processing scheme for harmonic oscillators.

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更新日期/Last Update: 2019-11-25