PSN-PZT陶瓷及其在加速度传感器中的应用研究-《郑州大学学报(工学版)》

文章信息/Info

Title:: Studies on PSN-PZT Ceramics and Its Application in the Acceleration Sensor

Author(s):: Zhan Zili; Li Yafeng; Chen Xiangyu; Chen Kecheng; College of Chemical Engineering and Energy, Zhengzhou University, Zhengzhou, Henan 450001

摘要:: 利用传统固相烧结法制备了0.02Pb(Sb0.5Nb0.5)O3-0.98Pb1-2xBaxSrx(Zr0.53Ti0.47)O3压电陶瓷(其中x=0.02,0.03,0.04,0.05).讨论了不同Ba、Sr复合掺杂量及烧结温度对陶瓷结构和电性能的影响.结果显示,当x =0.04,烧结温度为1260℃时,压电陶瓷的性能最佳,其中d33 =615 pC/N,ε33/ε0=2224,tanδ=2.11％;然后把这个配方的陶瓷片安装到传感器中,测试其电荷灵敏度、最大横向灵敏度比和最大线性误差,电荷灵敏度为2.72 pC/(m·s-2),最大横向灵敏度比小于5％,最大线性误差为2.97％,符合通用振动测试类型传感器使用要求.

Abstract:: 0.02Pb(Sb0.5Nb0.5)O3-0.98Pb1-2xBaxSrx(Zr0.53Ti0.47)O3 piezoelectric ceramics (where x=0.02,0.03,0.04,0.05) were prepared by traditional solid-state sintering method. The different The effect of Ba, Sr composite doping amount and sintering temperature on the structure and electrical properties of ceramics. The results show that when x = 0.04 and the sintering temperature is 1260 ℃, the performance of piezoelectric ceramics is the best, where d33 = 615 pC/N, ε33/ε0=2224, tanδ=2.11%; then install the ceramic chip of this formula into the sensor, test its charge sensitivity, maximum lateral sensitivity ratio and maximum linearity error, the charge sensitivity is 2.72 pC/(m s-2) , the maximum lateral sensitivity ratio is less than 5%, and the maximum linear error is 2.97%, which meets the requirements for the use of general vibration test type sensors.