基于微加热器平台的高性能甲烷传感器-《郑州大学学报(工学版)》

文章信息/Info

作者:: 郭联峰; 李铁; 许宗珂; 段国韬; 1.中国科学院上海微系统与信息技术研究所,上海200050;2.微系统技术国家实验室,上海200050;3.中国科学院固体物理研究所,安徽合肥230031

Author(s):: GUO Lianfeng1; 2; XU Zongke2; DUAN Guotao3; Ll Tiel 2; 1. Shanghai Ilnstitute of Microsystem and lnformation Technology,Chinese Academy of Sciences,Shanghai 200050,China;2.Science and’Technology on Microsystem Laboratory,Shanghai 200050,China; 3.Institute of Solid State Physics,Chinese A-cademy of Sciences,Hefei 230031,China.

Keywords:: methane gas sensor; micro-hotplatform; tin dioxide in-situ fabrication; template method; micro/nano fusion

摘要:: 设计制造了基于微型加热器平台(MHP’)的甲烷气体传感器.微加热器平台因其功耗低、体积小等特点可广泛应用于半导体气体传感器中.微加热器平台的制作是基于IC兼容的MEMS 工艺完成的，利用模板法在MHP上原位制备二氧化锡(SnO)有序多孔薄膜得到微纳融合气体传感器.利用这种方法制造的传感器功耗仅39 mW ,响应时间2s ,对714 mg/m’甲烷的响应可达到1.19,对甲烷的探测下限可达 18 mg/m’.此高性能、低成本的传感器有望在生产生活、安全监控等方面得到广泛应用.

Abstract:: Abstract:High performance methane gas sensor based on micro-hotplatform ( MHP) was designed and fabri-cated. MHP is widely used in semiconductor gas sensor because of its low power consumption,small volumecharacteristics.The MHP is fabricated based on lC compatible MEMS technology. Micro-nano gas senor wasprepared through in-situ fabrication of tin dioxide using template method. The power consumption of the sensoris only 39 mW , and the response time is 2 s,and the sensitivity to 714 mg/m’methane is as high as 1.19.Because of high signal noise ratio,the detection limit is estimated to be 18 mg/m’through liner fit.The highperformance and low cost sensor is expected to be widely used in industry and safety monitoring.