[1]迟庆国,李伟力,费维栋..TiO2种子层对(Pb,La,Ca) TiO3薄膜织构的影响[J].郑州大学学报(工学版),2009,30(01):144-147.
CHI Qingguo,LI Weili,Fei Weidong.Effect of TiO2 Seed Layer on Texture of (Pb,La,Ca) TiO3 Films[J].Journal of Zhengzhou University (Engineering Science),2009,30(01):144-147.
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TiO2种子层对(Pb,La,Ca) TiO3薄膜织构的影响()
《郑州大学学报(工学版)》[ISSN:1671-6833/CN:41-1339/T]
- 卷:
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30
- 期数:
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2009年01期
- 页码:
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144-147
- 栏目:
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- 出版日期:
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1900-01-01
文章信息/Info
- Title:
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Effect of TiO2 Seed Layer on Texture of (Pb,La,Ca) TiO3 Films
- 作者:
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迟庆国; 李伟力; 费维栋.
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哈尔滨工业大学,材料科学与工程学院,黑龙江,哈尔滨,150001, 哈尔滨工业大学,材料科学与工程学院,黑龙江,哈尔滨,150001, 哈尔滨工业大学,材料科学与工程学院,黑龙江,哈尔滨,150001
- Author(s):
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CHI Qingguo; LI Weili; Fei Weidong
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School of Materials Science and Engineering,Harbin Institute of Technology,Harbin 150001,China
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- 关键词:
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TiO2种子层; PLCT薄膜; 织构
- Keywords:
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TiO2 seed layer; PLCT film; Texture
- 文献标志码:
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A
- 摘要:
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利用脉冲激光法(PLD)制备了镧钙掺杂的钛酸铅(Pb0.8La0.1Ca0.1) Ti0.975O3(PLCT)热释电薄膜,通过广角X射线衍射(XRD)研究了薄膜的相组成,利用X射线镜面反射表征TiO2种子层的厚度,通过X射线衍射及ω扫描研究了TiO2种子层对薄膜晶体学织构及其弥散程度的影响.结果表明,合适的晶化温度可以获得纯钙钛矿相的PLCT热释电薄膜.种子层的引入改变了薄膜的织构类型,无种子层时,薄膜倾向于形成(100)织构;而引入TiO2种子层则有利于薄膜(301)织构的形成.
- Abstract:
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Lanthanum calcium-doped lead titanate (Pb0.8La0.1Ca0.1) Ti0.975O3 (PLCT) pyroelectric films were prepared by pulsed laser (PLD), the phase composition of the films was studied by wide-angle X-ray diffraction (XRD), the thickness of TiO2 seed layer was characterized by X-ray specular reflection, and the effect of TiO2 seed layer on the crystallographic texture of thin film crystallography and its diffusion degree was studied by X-ray diffraction and ω scanning. The results show that PLCT pyroelectric films of pure perovskite phase can be obtained at a suitable crystallization temperature. The introduction of the seed layer changes the texture type of the film, and when there is no seed layer, the film tends to form a (100) texture; The introduction of TiO2 seed layer was conducive to the formation of thin film (301) texture.
更新日期/Last Update:
1900-01-01